

Including 0.32 € for eco-contribution
HBO-IC Microlithography lamps for Nikon i-line systems
Safety
Because of their high luminance, UV radiation and high internal pressure HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions.
Literature
Further technical information on HBO lamps and information for manufacturers of operating equipment can be found in the following publications, obtainable on request from OSRAM: